传感器力敏元件位置优化及其动态特性研究

The Optimization of Force Transducer Sensing Element's Position and its Dynamic Characteristics

力传感器的敏感单元位置布置对传感器的输出特性有重要影响 ,本文基于有限单元模型分析了传感器敏感单元位置应变是多阶模态响应的线形组合 ,敏感单元位置与传感器灵敏度、动态特性之间密切相关 。

The positions of sensing elements have great influence to force sensor's output characteristics. Its strain is a linear combination of all rank modes. The relationship between sensing element position and its output dynamic behavior is analyzed theoretically in this paper. In the end, the input output response of an 3 axial accelerometer is discussed.