微型可编程相位光栅结构设计及有限元分析

Structure Analysis and FEA of Micro Programmable Phase Grating

微纳米技术的迅速发展促使微机电系统 (MEMS)与微光学相结合形成微光机电系统 (MOEMS) ,从而为可编程相位光栅的研究和实现提供了可能。在 MOEMS的设计中 ,仅用传统的分析手段已经不够 ,其建模和仿真需要用到有限元分析。本文提出了一种可编程相位光栅的可变形结构 ,运用经典理论建模 ,通过计算得到其变形的定性分析结果和定量的近似结果 ,并提出一个用有限元分析软件 ANSYS进行有限元建模的实例 。

The rapid development of micro/ nano- technology leads to the combination of micro- optics and MEMS,which is referred to as MOEMS.An electrostatically driven,doubly supported beam structure capable of generating deflection is presented in this paper,which is designed for the micro- mechanical part of the pro- grammable phase grating based on MOEMS.The deflection characteristics of the beam model are described with numerical analysis.And a finite element model is established and calculated by ANSYSto verify the mod- el.