硅微谐振传感器微弱频率变化的提取新方法

A New Method of Weak Frequency Variation Detection in Silicon-micro Resonant Sensor

由于硅微谐振传感器在感测压力、温度变化时存在频率变化较弱的特点 ,提高其灵敏度和测试分辨率显得尤为必要 ,所以提出利用系统从混沌状态到大周期状态转变时所表现出的共振锁频性质 ,进行了传感器微弱频率变化信号的仿真实验提取。将带通采样和降采样应用到信号预处理 ,建立了利用混沌的测试系统 。

It is needed to enhance sensitivity and resolving power in micro resonant sensor which gives weak frequency variation in percepting pressure's and temprature's variation.The simulated extraction of weak frequency variation signal is carried out with the expressed resonant frequency locking property when system transits from chaotic to great periodic motion.With signal preprocessing used band pass sample and downsample,measure system is founded based on chaos.At same time it is pointed that the system can realize flexible measure with different demands for precision and sensitivity in micro resonant sensor.