红外热像光学镜组轴偏测量仪

Decentration Surveying Instrument of Infrared Thermal Imaging Optical Lens

原则设计了用于 8— 14μm红外光学镜组的轴偏检测系统 ,系统包括 CO2 激光器、可调焦望远镜、TGS热释电热像仪与计算机配合的数据读出及处理、径向跳动≤ 1μm,轴向晃动≤ 1″的高精密基准轴工作台。测量精度 :角度≤ 2 ″,线度≤ 0 .0 2 mm。编制了轴偏数据处理程序。更换光源 (用波长 3.39μm的 He— Ne激光代替 CO2 激光 )系统可用于 3—

A decentration measuring system of 8-14μm infrared optical lens is designed in principle, including co 2 laser, internal focusing telescope, TGS pyroelectric thermacam, computer data processing system and high precision datum axle worktable which radial missing less than 1μm, axial shaking less than 1 ″.The precision of decentration measurement in this system is angle≤2 ″,linear extent≤0.02mm.The data processing program is also put forward. The system can be used in the measurement of 3-5μm optical system while changing the light source into 3.39μm He-Ne laser.