移相式数字光学轮廓仪的研制

The Digital Optical Profiler with Phase-shifting Technique

相移干涉技术是表面轮廓测量领域中得到了广泛应用的可实现高精度测量的技术方法。本文将相移干涉技术与上海光学仪器厂的 6 JA型干涉显微镜结合起来 ,研制成功了移相式数字光学轮廓仪 ,其测量范围 0 .5 nm～ 1um,精度达到了 σ<0 .0 5 nm(Ra) ,σ<0 .7nm(P- V)。由于相关技术的突破 ,该仪器可以对多种材料、多种轮廓形状的表面实现测量 。

Phase shifting interferometry has been commonly applied as a high precision method in profile measurement.The paper integrates the phase shifting technique with 6JA interferometer manufactured by Shanghai Optical Instrument Factory and designs a digital optical profiler.Its measurement range is 0 5nm～1um,measurement accuracy σ<0 05nm(Ra),σ<0 7nm(P-V).For the solution of some correlative techniques,the designed instrument can measure many kinds of surfaces with different materials and different profile shapes and all get good results.