薄膜式锰铜传感器的超高压力标定

Calibration of Thin-film Ultrahigh Pressure Manganin Gauges

为拓展锰铜传感器的高压测试上限 ,本文采用薄膜技术研制了一种新型的锰铜传感器。该传感器采用氧化铝封装 ,后置式结构 ,两步薄膜工艺制作。利用二级轻气炮进行了 40～ 10 7GPa的冲击高压加载 ,试验波形呈现出一理想的平台 ,寿命为 1μs。标定曲线 Px(GPa) =6 .0 371+2 9.819(ΔR/ R0 ) +2 1.5 91(ΔR/ R0 ) 2 - 6 .82 6 7(ΔR/ R0 ) 3近似于一条直线 ,精度达± 3%

To extend the measurement range to 100 GPa,a new type of manganin gauges was prepared by thin film technique.The gauges were designed as back surface configuration,encapsulated in alumina matrix and fabricated by two step thin film methods.Shock loadings in the 40-107 GPa range by a light gas gun resulted in flat topped stress time profiles with about 1 μs record history.The calibration curve P x(GPa)=6 0371+29 819(ΔR/R 0)+21 591(ΔR/R 0) 2-6 8267(ΔR/R 0) 3 was almost a straight line with errors less than ±3%.