摘要
本文通过实验研究,讨论了实验参数对衬底表面形貌和MOCVD生长样品质量的影响,与文献所给实验条件进行了比较。
This paper discusses, through detailed experiments, the effects of substrate processing experimental parameters on substrate morphology and MOVCD-grown epitaxial layer quality. Comparison has been given with other published experimental conditions.
出处
《长春光学精密机械学院学报》
1993年第4期58-60,共3页
Journal of Changchun Institute of Optics and Fine Mechanics
