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溶胶—凝胶法制备 SrBi_2Ta_2O_9(SBT)铁电薄膜的研究

THE STUDY OF PREPARATION SrBi_2Ta_2O_9(SBT) THIN FILMS BY SOL- GEL PROCESS
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摘要 以乙醇钽、醋酸锶和硝酸氧铋为原材料,乙二醇单甲醚为溶剂,可以获得稳定的SBT溶胶和凝胶。采用Pt/Ti/SiO2/Si基片,通过溶胶—凝胶法在800℃经快速热处理制备出钙钛矿相SBT薄膜。XRD结果分析表明,薄膜的择优取向为(115)和(008),其饱和极化强度和剩余极化强度分别为Ps=8.8μC/cm2,Pr=5.2μC/cm2。 A stable sol and gel of SBT was prepard. Pentaethoxy tantalum, strontium acetate, and bismuth subnitrate were used as raw materials and methoxyethylene as solvent. The SBT sol was spin- coated onto Pt/Ti/SiO2 /Si substrate. After annealing by rapid thermal treat at 800℃, perovskie SBT thin films was obtained. XRD result indicated that the thin films have high oriented tex- ture at (115) and (008) orientaion. The remnant polarization and the saturated polarization were about 8. 8μC/cm2 and 5. 2μC/ respectively.
机构地区 哈尔滨工业大学
出处 《陶瓷学报》 CAS 2001年第4期244-247,共4页 Journal of Ceramics
基金 哈尔滨工业大学校基金资助(项目编号:HIT.2001.67)
关键词 溶胶-凝胶 SrBi2Ta2O9 铁电薄膜 sol - gel, SiBi2 Ta2 O9 , ferroelectric thin films
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