直流磁控溅射辉光等离子体的Langmuir静电探针诊断

Langmuir Probe Diagnosis of DC Magnetron Sputtering Glow Discharge Plasma

与大连理工大学合作研制了新型Langmuir静电探针。应用研制的静电探针,对氩气直流磁控溅射铜等离子体进行了轴向和径向二维空间内的诊断。诊断结果显示:电子温度随着离靶面距离增大而递减;电子密度在径向和轴向均存在波动;电子能量主要分布在0eV～5eV范围内,高能电子占比例极少。

A novel type of Langmuir probe has been successfully developed and fabricated to diagnose the glow discharge plasma used in direct current(DC)magnetron sputtering.The 2-dimensional diagnosis along the radial and axial directions of the argon plasma in DC magnetron sputtering of copper target was performed.The results show that the plasma temperature decreases as the position moves away from the target,and that both the radial and axial electron density distributions fluctuate.In addition,the electron energy...