用定容式气体流量计进行真空规校准方法的研究

INVESTIGATION FOR CALIBRATING VACUUM GAUGE UTILIZING CONSTANT VOLUME FLOWMETER

提出了一种采用定容式气体流量计校准真空规的方法,并对校准装置进行了不确定度的分析。定容式气体流量计有2种工作模式:采用定容法模式可以提供(10-8～10-2)Pa.m3/s的流量,采用固定流导法模式可以提供(10-6～10-11)Pa.m3/s的流量,2种方法组合提供的标准流量范围变宽,延伸了流量下限。定容式气体流量计相对于恒压式气体流量计,有结构简单、操作方便等特点。采用定容式气体流量计校准真空规的范围为(10-6～10-2)Pa,合成标准不确定度为(0.67～1.74)%。并用恒压式气体流量计校准同一分离规进行了比较,2个校准结果一致性好于5.7%。

An new method of calibrating vacuum gauge which produce standard flow by using constant volume flowmeter is proposed in this paper.The constant volume flowmeter works in two modes: one is constant volume mode which can provide the flow of(10-2～10-8)Pa.m3/s,another is constant conductance mode which can provide the flow of(10-6～10-11)Pa.m3/s.By this way,the standard flow range is extended.Compared with the constant pressure flowmeter,constant volume flowmeter has the advantage of facility,simple structure et...