摘要
研究了利用液晶空间光调制器的相位调制特性进行光学测量的方法。测试美国BNS公司反射式256×256纯相位液晶空间光调制器,相位响应呈非线性。利用反插值法对非线性相位响应进行了校正,使非线性度缩小1/8,获得了该器件线性的相位响应曲线。利用液晶空间光调制器产生相息图,能够将PV值为0.78λ,均方根为0.13λ的不规则波面,调制成PV值为0.27λ,均方根为0.02λ的近似平面波。实验结果表明,液晶空间光调制器作为补偿器能够应用于任意光学表面的测量。
The method of optical measurement using the phase characteristics of liquid crystal spatial light modulator is discussed. The reflecting phase-only liquid crystal spatial light modulator from American BNS company is measured and the phase response is nonlinear. The phase nonlinearity reduces to 1/8 by inverse interpolation and the linear phase response curve is obtained. The Kinoform from this device is used to modulate the arbitrary wavefront which PV is 0.78 λ and RMS is 0.13 λ to approximate plane wavefr...
出处
《红外与激光工程》
EI
CSCD
北大核心
2008年第S1期39-42,共4页
Infrared and Laser Engineering
关键词
光学测量
液晶
空间光调制器
相位调制
相息图
Optical measurement
Liquid crystal
Spatial light modulator
Phase modulation
Kinoform
