摘要
研究了移相式泰曼型红外干涉仪的工作原理以及仪器的整体设计,讨论了透射光学元件的材料选取问题,对仪器的扩束系统、成像系统进行了理论分析和设计,以及对光源和红外探测器等一些关键器件进行了设计分析。解决了红外干涉仪调试这一技术难点。测量了精磨粗糙平面和球面的面形,结果表明:粗糙平面的面形偏差为0.047λ(PV),而粗糙球面的面形偏差则为0.420λ(PV)(λ=10.6μm)。
Working principle and whole design of Twyman infrared phase-shifting interferometer are investigated. The problem of how to select the materials of transmission optical elements is investigated. The theoretical analysis and design of the beam expander and imaging system are discussed. And the design analysis of the souce of lignt and the infrared detector is presented. The problem of infrared interferometer′s alignment is solved. The rough plane and the rough spheric glass are measured. The measurement resu...
出处
《红外与激光工程》
EI
CSCD
北大核心
2008年第S1期55-59,共5页
Infrared and Laser Engineering
关键词
红外干涉仪
调试
测量
Infrared interferometer
Alignment
Measurement
