激光衍射法细圆柱体直径测量系统

System of thin cylinder diameter measurment by laser diffraction

为了提高激光衍射法细圆柱体直径测量精度,根据光波的矢量特性建立了矢量测量模型,提出了一种衍射花样处理方法,并研制了相应的测量系统。采用面阵CCD接收衍射花样,并使用二维零相位滤波器、最小二乘法等方法对其进行处理。运用该装置测量细圆柱体直径时,克服了传统方法测量细圆柱体直径时的原理误差,提高了测量精度。细圆柱体直径测量实验结果表明,基于改进模型的光学衍射法的相对测量误差在0.5%以下,优于目前1%的水平。

To improve measurement accuracy of thin cylinder′s diameter by laser diffraction, an vector model was established, a novel processing metod of diffraction pattern was presented and the measurement system was designed at the same time. Theoretical error of customary measurement is eliminated so that the measurement accuracy is improved when the diameter is measured with this measurement system. Experimental results show that the relative measurement error is less than 0.5%, which is better than the present l...