摘要
对应用于线列扫描成像系统的高频高精度摆镜性能测试系统进行了研究,重点解决了摆镜摆角的高精度测量问题,对影响测试精度的关键因素进行了分析,并提出了相应的工程解决方案。
A performance testing system of the high-precision and high-frequency scanning mirror used in scanning infrared imaging systems is introduced in this paper. Focusing on the high precision angle measurement of the scanning mirror, this paper analyzes the key factors degrading measuring accuracy, and puts forward the corresponding practical resolution.
出处
《红外与激光工程》
EI
CSCD
北大核心
2008年第S1期35-38,共4页
Infrared and Laser Engineering
关键词
激光自准直测量
PSD
角度测量
试精度
Laser auto-collimation measurement
PSD
Angle measurement
Measuring accuracy
