三分量光波导加速度传感器中双M-Z干涉仪结构设计

Structure Design of Double Mach-Zehnder Interferometer in Three-component Photoelastic Waveguide Accelerometer

为了实现强电磁场环境下的三维地震高精度勘探,提出了一种新型的三分量光波导加速度传感器。对三分量光波导加速度传感器的双M-Z光波导干涉仪进行了研究和优化设计。用有效折射率法(E IM)分析了T i∶L iN bO3波导的单模传输并设计了单模波导。双M-Z光波导干涉仪的Y分支设计采用反正弦S型弯曲,并用有限差分光束传播法(FD-BPM)对干涉仪中光传输进行了理论分析和模拟计算,实验与理论分析吻合。对成功制作的双M-Z干涉芯片进行了测试。实验结果表明,干涉芯片性能良好。

In order to realize a high accuracy seismic exploration in the high electro-magnetic area,a novel three-component photoelastic waveguide accelerometer is presented.Double Mach-Zehnder waveguide interferometer of the optical accelerometer is researched and its optimization structure design is accomplished.The single mode transmission of Ti∶LiNbO3 waveguide is analyzed by EIM,and the single mode waveguide is designed.An S-shaped curve is used for the transition connecting two offset parallel waveguides in Y-b...