过渡区p层在高速沉积非晶硅薄膜电池中的应用

Application of the transition zone p layer in amorphous silicon thin film solar cells with high deposition rate

研究了采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术沉积从微晶相向非晶相相变的过渡区p层,并将其作为电池的窗口层应用到高速沉积的非晶硅薄膜电池中。通过调整p层的沉积参数,获得不同p层的暗电导率从1.0E-8S/cm变化到1.0E-1S/cm,并获得了从微晶相向非晶相转变的过渡区p层。实验发现,电池的开路电压Voc随p层SiH4浓度的增加先增加后降低,当p层处在过渡区时达到最大;p层处在过渡区时电池的短路电流Isc和填充因子FF都得到了不同程度的提高。在p/i界面引入buffer层后,能进一步显著提高电池的FF和Voc。在过渡区p层作为电池窗口层,没有背反射电极,本征层沉积速率为1.5nm/s情况下获得效率达8.65%(Voc=0.89V,Jsc=12.90mA/cm2,FF=0.753)的高速非晶硅薄膜电池。比较了过渡区P层与P-a-SiC:H分别作为电池窗口层对于电池性能特别是FF的影响,由于存在结构演变的原因,FF对于过渡区P层厚度的依赖大于后者。

This paper studies the deposition of the transition p layer (from microcrystalline phase to amorphous phase) as window layer in high-rate deposition of amorphous silicon thin film solar cells by using very high frequency plasma enhanced chemical vapor deposition(VHF-PECVD).By adjusting the deposition parameters (including the SC,glow power,etc.),the dark conductivity of the p layers is from 1.0 E-8S/cm to 1.0 E-1S/cm,finally we obtain the transition p layer.With increasing the SC of the p layer,the Voc incr...