精密工作台伺服控制系统研究

Study on Servo Control System of Precision Service Platform

随着精密工作台运动速度和精度的进一步提高，对工作台的控制系统的要求也越来越高。本文针对微器件装配系统中粗动精密工作台的控制，研究了直流力矩电机的脉宽调制(PWM)驱动方法，控制系统通过引入速度和电枢电压负反馈，较好地解决了精密工作台低速爬行、死区和机械谐振等问题，满足了系统对运动快速性、低速平衡性和高精度的要求，最高调速比可达1294，工作台重复精度达±1μm。

To meet the development of precision service platform with higher speed and accuracy,the servo control system should be designed more deliberately.This paper introduced a novel servo control system for the precision service platform in the micro assembly system.The control system adopted PWM driving technique.By introducing speed and output voltage feedback,the dead zone and the creeping in low speed were abated obviously.As a result,the repeatable precision of the platform and the adjustable speed ratio can be up to ±1μm and 1294,respectively.