摘要
The increasing complexity of modern functional materials leads to the demand of acost efficient tool for the development of new products. One possible approach to thisquestion is the adaptation of combinatorial methods to the specific requirements of ma-terials industry. These methods, originally developed for the pharmaceutical industry,have recently been applied to the screening of superconductive, magnetoresistant andphotoluminescent materials. The principle of these combinatorial approaches is thedeposition of large materials libraries in one process combined with fast methods forthe determination of the resulting properties. In this paper, the deposition and charac-terization of laterally graded materials libraries (composition spread) is presented. Thefilms have been deposited by reactive magnetron sputtering, using two or three metallictargets at a low angle to the substrate surface as well as a system of apertures. Toillustrate the advantages of combinatorial approaches for the development of advancedmaterials, the multicomponent metastable hardcoatings (Ti, Al)N and Ti-Al-Si-N arediscussed with special emphasis on the relations between structure and composition onthe one hand and the oxidation resistance of these coatings on the other. The resultsillustrate that the composition spread approach is a powerful and cost efficient tool forthe development and optimization of new multicomponent functional materials.
The increasing complexity of modern functional materials leads to the demandof a cost efficient tool for the development of new products. One possible approach to this questionis the adaptation of combinatorial methods to the specific requirements of materials industry.These methods, originally developed for the pharmaceutical industry, have recently been applied tothe screening of superconductive, magnetoresistant and photoluminescent materials. The principle ofthese combinatorial approaches is the deposition of large materials libraries in one processcombined with fast methods for the determination of the resulting properties. In this paper, thedeposition and characterization of laterally graded materials libraries (composition spread) ispresented. The films have been deposited by reactive magnetron sputtering, using two or threemetallic targets at a low angle to the substrate surface as well as a system of apertures. Toillustrate the advantages of combinatorial approaches for the development of advanced materials, themulticomponent metastable hardcoatings (Ti,Al)N and Ti-Al-Si-N are discussed with special emphasison the relations between structure and composition on the one hand and the oxidation resistance ofthese coatings on the other. The results illustrate that the composition spread approach is apowerful and cost efficient tool for the development and optimization of new multicomponentfunctional materials.
基金
The financial support is granted by the Deutsche Forschungsgemeinschaft, Collabo-rative Research Center 289. "Forming of metals in the semi solid state and their properties" is gratefully acknowledged.
