摘要
Compounds of the B-C-N system are very promising to produce superhardcoatings with good tribological, chemical and thermal properties. Consequently, BCN films wereprepared by plasma enhanced chemical vapor deposition (PECVD). The films were deposited from gaseousmixtures of BCI_3-C_2H_4-N_2-H_2-Ar in different unipolar and bipolar pulsed glow discharges at 550deg C and analyzed with respect to composition, electronic structure and mechanical properties. Themicrostructure and composition of the BCN films were determined by scanning electron microscopy(SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and reflection electronenergy loss spectroscopy (REELS). Mechanical properties were characterized using both thetraditional Vickers method and nanoindentation. The films, that were deposited using a bipolarpulsed generator, were weak and had a sponge-like structure, whereas the films prepared using anunipolar generator were well adherent, had a hardness of more than 11GPa and very high elasticrecoveries of up to 80 percent. The elasticity properties supposedly result from the formation of afullerene-like structure.
Compounds of the B-C-N system are very promising to produce superhardcoatings with good tribological, chemical and thermal properties. Consequently, BCN films wereprepared by plasma enhanced chemical vapor deposition (PECVD). The films were deposited from gaseousmixtures of BCI_3-C_2H_4-N_2-H_2-Ar in different unipolar and bipolar pulsed glow discharges at 550deg C and analyzed with respect to composition, electronic structure and mechanical properties. Themicrostructure and composition of the BCN films were determined by scanning electron microscopy(SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and reflection electronenergy loss spectroscopy (REELS). Mechanical properties were characterized using both thetraditional Vickers method and nanoindentation. The films, that were deposited using a bipolarpulsed generator, were weak and had a sponge-like structure, whereas the films prepared using anunipolar generator were well adherent, had a hardness of more than 11GPa and very high elasticrecoveries of up to 80 percent. The elasticity properties supposedly result from the formation of afullerene-like structure.
基金
The financial support from the Deutsche Forschungsgemeinschaft under contract NE 351/29-1 is gratefully acknowledged. In addition, the authors would like to thank Achim Etzkorn and the Lehr-und Forschungsgebiet Werkstoffwissenschaften for the nanoindenta
