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STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS 被引量:3

STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS
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摘要 Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactive sputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as target material and copper sheets as substrate. Using SEAL Spectrophotometer and Talystep to analyze the relations between the selective characteristic and the structure, the formation and the thickness of the thin films. The aim is to obtain good solar selective thin films with high absorptance and low emittance, which is applied to flat plate solar heat collectors. Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactive sputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as target material and copper sheets as substrate. Using SEAL Spectrophotometer and Talystep to analyze the relations between the selective characteristic and the structure, the formation and the thickness of the thin films. The aim is to obtain good solar selective thin films with high absorptance and low emittance, which is applied to flat plate solar heat collectors.
出处 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2002年第2期203-206,共4页 金属学报(英文版)
基金 supported by the Chinese Academy of Sciences within“The Hundred Talent Project" by the Bureau for Sciences and Technology of Guangzhou City within the"Nanoproject"
关键词 solar selective thin film magnetron reactive sputtering. absorptance EMITTANCE solar selective thin film, magnetron reactive sputtering. absorptance, emittance
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  • 1[1]I. Hotovy, J. Huran, V. Breternitz, L. Spiess, G. Teichert and J. Schawohl, 43rd International Scientific Colloquium, Technical University of Ilmenau, September 21-24, 1998
  • 2[2]Y.Z.Cao and X.F. Hu, Acta Energiae Solaris Sin. 20(3) (1999) 274.
  • 3[3]X.J. Yang, Z.Q. Yin and Y.Y. Shi, Acta Energiae Solaris Sin. 18(1) (1997) 7.
  • 4[4]A, Kang, L.Y. Zhang and X. Yao, Material Review 12(4) (1998) 39.

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