摘要
The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential stages is calculated;the differential pumping system design and equipment choice are introduced;the tests of Molecular/Booster Pump(MBP),a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.
本研究是为了设计一套大流量、清洁的真空差分系统.计算了超重反冲核实验装置终端真空差分系统各级的真空度;介绍了差分系统的设计和真空泵、测量设备选择;选择能在高压强下连续运行的新型分子/增压泵作为过渡流范围内的主排气泵,对分子增压泵进行了性能测试并对差分系统进行了模拟靶室实验,最后对实验结果进行了分析.
基金
国家自然科学基金(10675152)资助~~
