摘要
叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备,并对该离子源的I-V特性、角电流密度、稳定性以及寿命等性能进行了测试,结果表明,该源的各项指标均达到了聚焦离子束系统对液态金属离子源的性能要求。
The liquid gallium ion source for nanometer focused ion beam system was prepared and its I-V curve, angular current density, stability and lifetime were measured. The results indicate that all performance indexes of the source can be satisfied with requirements of the nanometer focused ion beam system.
出处
《微细加工技术》
EI
2007年第1期7-10,59,共5页
Microfabrication Technology
关键词
聚焦离子束
液态金属离子源
测试系统
发射尖
focused ion beam
liquid metal ion source
testing system
emitting tip
