基于SEM的图形检测系统设计

Design of Image Scanning System Based on SEM

为满足快速扫描大面积图形的需要,设计了基于扫描电镜的高速图形检测系统。该系统采用快速硬件扫描方式来提高图形检测的速度,可应用于对芯片质量、内部线路状况的检测。介绍了以现场可编程逻辑门阵列(FPGA)为逻辑控制核心的图形检测系统的硬件结构及其工作流程,主要阐述了系统中的D/A转换部分电路的组成和工作原理、图形校正的原理以及系统设计时的注意事项。同时还给出了FPGA在系统中的主要功能以及程序流程图(程序采用VHDL(硬件描述语言)编写)。

A high speed image scanning system was designed to meet the requirement of fast scanning large images, which was based on scanning electron microscopy (SEM). In the system, fast scanning hardware was employed to enhance the scanning speed and the quality of chips and the states of the internal circuits were detected. The structure of hardware and the process of this system whose logical control center is Field Programmable Gate Array (FPGA) were illustrated. Simultaneously, the composing, the principle of D/A converter, the theory of image adjustment and some consideration of designing were emphatically described. Furthermore, the main function of FPGA was introduced and the main flow chart was portrayed and a program was edited by VHDL.