摘要
为了进一步挖掘传统光学曝光的潜力、扩展其应用范围、提高其曝光效率,对GCA3600F光学图形发生器数据处理技术开展了研究,其中包括对曝光数据的优化处理技术以及复杂图形切割算法的研究,并编制了相应的软件补偿程序。结果表明,该技术可有效提高光学图形发生器曝光效率,减少机器设备的磨损,提高光刻掩模版的精度。
The data processing technology based on GCA3600F pattern generator was studied to improve the capability of traditional optical exposure,widen its applications and enhance its exposure efficiency.This technology includes the optimizing of the exposure data,the algorithm of cutting of the complex patterns.Simultaneously,a program corresponding to these objectives was written.Compared with the original technology,this technology increases the exposure efficiency of the pattern generator,reduces the damage of the equipment,and enhances the precision of the mask.
出处
《微细加工技术》
2007年第3期9-12,共4页
Microfabrication Technology
