摘要
微流体控制系统是微机电集成系统(MEMS)一个主要分支,微泵作为微流体控制系统的重要组成部分,根据其有无阀片可分为有阀型微泵和无阀型微泵。无阀型微泵由于其结构相对简单、制造工艺要求不高,因而有着独特的发展优势。主要介绍了基于MEMS的扩张管/收缩管型无阀泵几年来在结构设计、制作工艺等方面的研究成果、现状和发展前景。
Microfluidic control system is the main offshoot of MEMS.Micropumps are the key part of the microfluidic control system and they are mainly divided into the micropumps with the check valves and the micropumps without these valves(valveless).The valeveless pumps possess unique development potential duo to their simple structures and techniques.By the diffuser/nozzle type valveless pumps of MEMS,the research achievements of the pumps on the structure design and the manufacturing process and their development prospect in last years were introduced in this work.
出处
《微细加工技术》
2007年第4期1-5,21,共6页
Microfabrication Technology
基金
辽宁省教育厅科学研究计划资助项目(05L062)
