摘要
针对超磁致伸缩薄膜制备过程中所关心的性能测试问题,提出了利用外加磁场引起薄膜变形,运用微位移传感器测试薄膜变形的新方法,以此为基础,建立了超磁致伸缩薄膜性能测试系统,并通过本系统测试比较了不同条件下制备的Tb0.27Dy0.73Fe2薄膜的磁性能。结果表明,在制备磁致伸缩薄膜材料过程中施加一个平行于薄膜长度方向的磁场,可得到更好的磁致伸缩性能。
To solve the problem how to test and evaluate the properties of Giant Magnetostrictive thin film(GMF),a new method was proposed via utilizing the micro-displacement sensor to measure the GMF deformation caused by the magnetic field and a new testing system was established to evaluate the properties of GMF.The properties of Tb0.27Dy0.73Fe2 in different preparation conditions were summarized and compared.The results show that the GMF films with better properties can be achieved by adding a magnetic field parallel to the direction of thin film length in the process of preparation.
出处
《微细加工技术》
2007年第4期34-38,共5页
Microfabrication Technology
基金
国家自然科学基金资助项目(50375154)
关键词
超磁致伸缩
薄膜
磁致伸缩系数
测试系统
Giant magnetostrictive
thin film
magnetostrictive flex coefficient
testing system
