摘要
用电化学沉积Cu作为牺牲层制备面外运动电热微驱动器的悬空结构,并建立了一种简单、可靠的牺牲层工艺技术。该工艺具有工艺流程简单、牺牲层易获取、释放简单、腐蚀选择性好、结构保存完整等优点。通过退火去除残余应力、使用丙酮和F113进行悬空结构释放等方法改进工艺,可以得到理想的器件。证明电化学沉积Cu是比较好的制备悬空结构的牺牲层工艺。
A cantilever of electro-thermal actuator moved out-of-plane was fabricated by electroplating copper as sacrificial layer and a new technique of preparation of sacrificial layer was established.The technique possesses a simple process and the sacrificial layer is obtained easily and removed quickly.Simultaneously,the etching can be well selected and the perfect structure can remain.After eliminating residual stress by annealing and releasing the cantilever using acetone and F113,the ideal device can be obtained.
出处
《微细加工技术》
2007年第4期47-49,共3页
Microfabrication Technology
关键词
CU
牺牲层
电热微驱动器
Cu
sacrificial layer
electro-thermal actuator