摘要
以双频激光干涉仪在电子束曝光机精确定位中的运用为例(其具有典型的代表性),研究环境因素对微纳加工中精确定位的影响,并针对温度是其中影响最大的因素,提出了一种实时温度补偿方法,修正了测量结果由于热膨胀不能真实反映工件台位置带来的定位误差。
The influences of the environmental factors on the precise-position during micro-and nano-manufacture were studied by citing applications of the dual-frequency laser interferometer in the Electron Beam Lithography System in precise position as instances.Because temperature is the most important factor,a real-time temperature compensation method is proposed to correct the position error resulting from thermal expansion.
出处
《微细加工技术》
2007年第5期5-9,30,共6页
Microfabrication Technology
关键词
微纳加工
双频激光干涉仪
环境因素
热膨胀
实时温度补偿
micromanufacture
dual-frequence laser interferometer
environment factors
thermal expansion
real-time temperature compensation
