摘要
利用飞秒激光对H62黄铜、1Cr18Ni9Ti奥氏体不锈钢和7075铝合金进行加工,研究了激光参数和试验条件对三种合金材料的微细加工效果的影响。试验研究内容包括脉冲扫描速率与刻蚀宽度和深度的关系、入射脉冲数量与刻蚀宽度以及刻蚀效率的关系。运用扫描电子显微镜和激光共焦扫描显微镜对试验结果进行分析,发现对于三种合金材料而言,入射的脉冲数量达到某值后,刻蚀宽度基本保持恒定;黄铜和不锈钢的通道宽度与深度会随着激光扫描速率的提高而降低;飞秒激光可以对黄铜与不锈钢实现冷加工,单个脉冲的刻蚀率分别为102.4 nm和39.83 nm,是比较理想的微加工手段。
Brass(H62),Stainless steel(1Cr18Ti9Ni) and Aluminum alloy(7075) were nicroprocessed by femtosecond laser and the relationships of the pulse scanning rate with the etched width and depth,and the number of pulse with the etched width and etching efficiency were studied.The final samples were analyzed by SEM and LCSM and it is found that the etched width of these alloys keeps unchangeable when the number of pulse exceeds a definite value.For brass and Stainless steel,the width and depth of channels are decreased with the increasing of scanning speed of laser and they can be coldly processed by femtosecond laser,and the etching rates of a single pulse are respectively 102.4 nm and 39.83 nm,indicating that it is an idea micro-processing method.
出处
《微细加工技术》
2007年第5期14-17,共4页
Microfabrication Technology
基金
国家自然科学基金重点资助项目(50335050)
北京市属市管高等学校人才强教计划资助项目
关键词
飞秒激光
微细加工
黄铜
铝合金
不锈钢
femtosecond laser
microprocessing
brass
aluminum alloy
stainless steel
