摘要
进行了基于光刻技术的高频群脉冲微细电化学薄片加工(ECLM)试验研究。对于微细薄片型金属工件而言,在高频(20 kHz)、群脉冲形式的电压作用下,采用复合成分的电解液,选取合适的电化学加工参数,可获得理想的加工效果。试验结果表明,当加工电压幅值为10 V,初始间隙为0.1 mm时,所加工的超薄微细工件的精度可控制在10μm以内。该方法是微细薄片零件加工的一种有效方法。
Based on lithography technology,the electrochemical lamella machining(ECLM) by high frequency group pulses was experimentally studied.Under high frequency(20 kHz) group pulses,the micro-lamella metal parts with high precision can be obtained in compound electrolyte with proper electrochemical machining parameters.The results show that machining error of the micro-lamella metal parts can be controlled in the range of 10 μm when the pulse voltage and the initial gap are 10 V and 0.1 mm,illustrating that the method is an effective method of machining the micro-lamella parts.
出处
《微细加工技术》
2007年第5期22-25,共4页
Microfabrication Technology
关键词
ECLM
群脉冲
微细加工
电化学
ECLM
group pulses
micromachining
electrochemical
