摘要
电磁型MEMS开关比静电式的结构复杂,一体化集成加工困难。对于新型电磁驱动双稳态RF MEMS开关进行了材料的选择,并对一些主要材料的电镀和悬空结构的制备与释放进行了工艺优化研究。经过工艺整合,实现了电磁型RF MEMS开关的多种非硅材料和多元结构形式的一体化集成加工。
Compared with electrostatic radio frequency(RF) micro-electro-mechanical systems(MEMS) switch,the electromagnetic one has sophisticated structure,and it is hard to fabricate the electromagnetic MEMS switch by integration.For the novel electromagnetic bi-stable RF MEMS switch,the material was selected made and the process was optimized for the electroplating of main materials and the fabrication of suspended structure.The integrated fabrication of several amorphous silicon materials and sophisticated structure of the electromagnetic RF MEMS switch was realized by the integration of the process.
出处
《微细加工技术》
2007年第5期56-60,共5页
Microfabrication Technology
基金
国家863计划资助项目(2003AA404140)
信息产业部电科院预研资助项目(41308050116)
国家自然科学基金资助项目(60676047)
上海-应用材料研究发展基金资助项目(06SA11)
上海交通大学优秀博士学位论文基金资助项目
关键词
微机电系统
射频开关
双稳态
电磁驱动
集成加工
micro-electro-mechanical systems
radio frequency switch
bistable
electromagnetic actuation
integrated fabrication
