摘要
最近10年,计算机辅助设计技术(TCAD)的应用已在工业界和学术界普及。计算机硬件和软件迅猛发展和数值算法用的物理模型的精度、速度和鲁棒性显著提高,使TCAD作为晶片加工和计量的补充实验方法,成为降低成本的有效技术。
Over the past decade, the Utilization of technology CAD(TCAD) tools has become widespread in industry and academia. The enormous progress in computing hardware and software technology, together with significant advances in physical modeling accuracy, and speed and robustness of numerical algorithms, have made TCAD to a cost – effective albeit powerful technology that complements experimental approaches to wafer processing and metrology.
出处
《电气技术》
2006年第3期116-121,共6页
Electrical Engineering