电子束曝光机传输片机械手研制

Design of Auto Transporting Manipulator for E-beam Lithography System

以前的传输片机械手由于采用双浮动滑板结构来实现各个状态的定位,长时间使用易导致机械磨损、弹簧应力疲劳等,出现机械手碰撞片夹或抓不到片等现象,难以实现高精度、高可靠性的定位。研究中的传输片机械手采用卡尔登直线运动机构配合两根导向动轴以达到长期运行的稳定性及可靠性,克服了原传输片机构存在的上述问题,且动作过程有所简化,机构体积大大缩小,动作可靠性和准确度显著提高。介绍了传输片机械手的功能、组成及其结构设计,叙述了传输片机械手的动作原理和系统控制流程。

Manipulator is the performer of pallet transporting system for E-beam lithography. The performance of the system is tied up with the reliability and veracity of the manipulator. Floating parallel sliders are used in the former structure to orientate the manipulator. With the wear and tear of system, the tiredness of springs would make the manipulator unworkable. Thus, it is hard to orientate precisely and reliably. To resolve the problems, transporting manipulator is developed currently. The action process is briefer, the size is smaller and the performance is advanced evidently. The constitution and the structural design are introduced. Meanwhile, the action theory and the working process of the manipulator are described.