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微细切削加工技术 被引量:20

Micro-cutting Technology
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摘要 介绍了微细切削加工技术的研究背景,并对其研究现状进行了评述,分析了微细切削加工技术在研究与发展过程中存在的主要问题,提出了将来的研究方向。 The background of micro-cutting technology was introduced and the research situation on it was reviewed. Some subjects for the future researches on the technology are proposed after analyzing the major problems existing in the process of its development.
出处 《微细加工技术》 EI 2006年第3期1-5,9,共6页 Microfabrication Technology
基金 国家自然科学基金资助项目(10477008)
关键词 微细加工 微细切削 MEMS 微米尺度 microfabrication micro-cutting MEMS micro-scale
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参考文献42

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二级参考文献25

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