保偏SiO_2光波导环形谐振腔温度特性研究

Temperature characteristic of ring resonator in polarization maintaining silica optical waveguide

利用低压化学气相淀积(LPCVD)技术研制了Si基SiO2保偏光波导环形谐振腔,通过测试不同温度下的谐振曲线,得到了谐振腔双折射率差温度系数,进而利用琼斯矩阵法建立了谐振腔温度特性分析模型,分析了温度波动对谐振腔两个偏振态输出谐振曲线的影响。分析表明,研制的Si基SiO2保偏光波导环形谐振腔芯片具有较好的温度特性,能在较大温度范围内避免温度波动带来的两个偏振态谐振谷的重叠现象。

Ring resonator in polarization maintaining silica optical waveguide is fabricated on a silicon substrate by low pressure chemical vapor deposition technique.The thermal coefficient of the birefringent refractive index is obtained by measuring the resonance curves at different chip temperatures.On this basis,Jones calculus is used to describe the polarization state of the light,a theoretical simulation model is set up to analyze the temperature characteristics of the ring resonator.It is demonstrated that th...