Ar等离子体处理PET在非晶硅太阳电池中的应用

Surface modification of polyethylene terephthalate substrate by argon plasma treatment and its application to amorphous silicon solar cells

在射频等离子体增强化学气相沉积(RF-PECVD)系统的腔室内,对聚对苯二甲酸乙二醇酯(PET)塑料薄膜进行Ar等离子体预处理,并采用光发射谱(OES)对不同处理参数下的氩气辉光状态进行在线监测。对处理前后PET及PET/ITO进行透过谱、原子力显微镜(AFM)以及扫描电镜(SEM)的测试结果表明,Ar等离子体处理改善了PET塑料薄膜的表面形貌,使之更适合ITO薄膜的生长。以Ar等离子体处理的PET/ITO为衬底,在沉积温度为125℃条件下,制备出效率为5.4%的p-i-n型非晶硅(a-Si)柔性太阳电池。

Polyethylene terephthalate(PET)films are treated by argon plasma in the chambers of RF-PECVD system.In situ optical emission spectroscopy(OES)measurements are used to study the influence of different treatment parameters(discharge power,pressure)on the intensity of glow discharge.The measurement results of transmittance spectra,AFM,SEM show that the surface morphology of PET films and the properties of PET/ITO films are both improved.Finally,single junction a-Si:H solar cells with p-i-n superstrate type on ...