半导体生产线调度与仿真系统研究与实现

The Research and Implementation of a Scheduling and Simulation System for Semiconductor Production Line

基于半导体制造企业的实际需求,在SIMUL8平台上设计并实现了半导体生产线调度与仿真系统TB-PSS。该系统主要由三个子系统构成:数据库子系统、仿真调度子系统和性能分析评价子系统。仿真调度子系统是TB-PSS系统的核心,它根据数据库提供的数据和调度规则从生产线当前状态开始仿真,仿真结果预测了生产线即将发生的事件,由性能分析评价子系统反馈给用户。目前,TB-PSS已在半导体生产线上得到了应用,能够辅助生产管理人员决策,并取得了较好的实际效果。

According to the practical demands from the semiconductor production lines, a scheduling and simulation system for semiconductor product line, TB-PSS, is designed and implemented on the platform of SIMUL8. TB-PSS is composed of three sub-systems: the database sub-system, the simulation and scheduling sub-system and the analysis of performance sub-system. The simulation and scheduling sub-system is the most important part of TB-PSS, which uses input data provided by database and policy rules to simulate from the current state of product line in time. The result is a plan that predicts what will happen in the real production line, showed to user by the analysis of performance sub-system. Now, TB-PSS has been applied in a semiconductor product line to assist the manufacture manager in making decision, and has gotten a well feedback.