摘要
研究了微型激光扩束镜准超光滑表面的加工工艺。分析了机床速度、压力、抛光粉、工作温度、抛光模等对高质量表面的影响。选定了一系列的工艺参数,大幅度地提高了产品的合格率。
The ultra-smoothing process for micro laser extender-lens is studied.The coefficients to affect the surface quality are analyzed,such as working speed,size and component of polishing abrasives,working temperature and plishing pad etc.After experiment and optimization,the passing percent of the production is improved.
出处
《光学技术》
CAS
CSCD
北大核心
2006年第z1期663-664,共2页
Optical Technique
关键词
微型扩束镜
高质量表面加工
检验方法
micro laser extender-lens
high surface quality
passing percent of the production
test method
