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微型柔性红外传感器的制作研究

Fabrication of micro flexible IR sensor
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摘要 利用微机电系统(MEMS)技术,制作了一种128×1元柔性红外传感器阵列.首先在硅片衬底上生长一层 PDMS 柔性材料,然后再在柔性材料上利用 MEMS 技术制作红外传感器阵列.采用六轴微小器件试验台进行扭弯试验.在传感器的两端施加一定的力使其弯曲,然后测传感器不同单元的电阻.试验结果表明:所制作的柔性传感器阵列能经受多次弯扭,电阻值基本没有变化,柔性传感器在经过弯扭3 300次后,传感器本身的柔性材料并没有断. Based on micro-electromechanical systems (MEMS) technology,a 128×1 elements flexible sensor array is fabricated.Firstly a PDMS flexible layer is made on Si substrate,then the sensor array is manufactured on the flexible layer.The test results show that the flexible sensor array is not broken after 3 300 times bending.
出处 《红外与激光工程》 EI CSCD 北大核心 2006年第z1期519-522,共4页 Infrared and Laser Engineering
关键词 微机电系统 MEMS 技术红外传感器 PDMS柔性材料 Micro-electromechanical systems (MEMS) IR sensor PDMS flexible material
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参考文献4

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二级参考文献6

  • 1Barth P W,Bernard S L,Angell J B.Flexible circuit and sensor arrays fabricated by monolithic silicon technology[J].IEEE Transactions on Electron Devices,1985,32:1202-1205.
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  • 5Xu Yong,Tai Yu-chong,Huang Adam,et.al.IC-integrated flexible shear-stress sensor skin[J].Journal of Microelectromechanical Systems,2003,12(5):740-747.
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