高功率准分子激光参数测量研究

Measuring research of the parameters of high power excimer laser

介绍了对高功率 XeCl 准分子激光 MOPA 系统中前三台激光器的输出激光进行的参数测量。实验分别对 MOPA 系统的前端输出种子光及其经过一级、二级、三级放大后所得激光进行了测量,研究包括采用哈特曼波前传感器对激光近场波前的测量和采用激光光束分析仪对激光远场光强的测量两个方面,分别得出激光的近场相位均方根误差和不同光斑尺寸定义下的远场发散角等实验测量结果,将实验结果与系统设计值进行比较分析,从而对激光器系统输出激光作出评价。

In this paper,some measuring researches on the parameters of the first three high power XeCl excimer lasers of MOPA system are introduced.In the experiments,the front-end laser of the MOPA system and the lasers after the first,second,third stage amplifiers are measured.With Hartmann wave-front sensor and laser beam analyzer,the distributions of the near field wave front and far field intensity of the laser are got.And the standard errors of phase and far-field divergence angles are got.After comparing the experimental results with the design values,an evaluation on the high power laser system is made.