非制冷红外探测器用热释电材料的研究进展

Progress of pyroelectric material for uncooled infrared detector

分析了热释电非制冷红外探测技术的优势,介绍了当前应用较广泛的各种非制冷红外探测器用热释电材料,即单晶材料、高分子有机聚合物及复合材料和金属氧化物陶瓷及薄膜材料,并预计了热释电材料的发展趋势。指出了铁电性热释电陶瓷材料的优越性,其应用分为正常热释电体、介电测辐射热型热释电体和弥散相变热释电体,并分别列出了具有代表性材料的研究结果。最后,指出了研究高性能、大尺寸、易加工的热释电薄膜材料的制备技术,是未来红外探测器用热释电材料的发展的关键;并在此基础上结合半导体集成工艺,制备高性能、大规模的热释电红外焦平面阵列。

In this article,the advantages of pyroelectric uncooled infrared detect technique is analysed.The pyroelectric materials,monocrystal,high-molecular organic polymer and composite,metal oxide ceramics and thin film,which are widly used at present for various uncooled infrared detectors have been introduced.At last the trend of development of the pyroelectric materials is predicted.The superiority of ferroelectric pyroelectric ceramics is pointed out,the applications of which are as normal pyroelectric material,pyroelectric material for dielectric bolometer and pyroelectric material of diffuse phase transition.The research results of the materials of representations is presented.In the end,it points out that it is important to develop the preparation technique for thin film which of high performance,big size,and is easy to process.On base of that,combining with semiconductor technology,the high performance and extensive pyroelectric infrared focal planes can be made.