超高反射率测量系统的精密调试

Critically adjustment of high reflectivity measurement system

在高反射率的精确测量中,光腔衰荡系统的调节直接影响反射率测量结果的精度。介绍了大口径超高反射率测量系统的结构及其工作原理,讨论了影响系统测量精度的因素,理论上估算的测量精度为9.1×10-6。在直腔下对该系统的性能进行了实验调试,根据衰荡波形的峰值包络线的变化趋势来调节衰荡腔的腔长;根据衰荡波形中相邻奇、偶次脉冲幅值的大小对比调节衰荡光腔的腔镜角度。实验测试结果表明,系统的测量不确定度优于7×10-6,最大测量误差为1.3×10-5,与理论上预计误差在数量级上一致。

During precise measurement of high reflectivity,cavity adjustment has great influence on reflectivity measurement results.Structure and working principle of the high reflectivity measurement system are introduced,and those factors that influence on its metrical precision are analyzed.According to theory analysis,precision of this system is 9.1×10-6.Experimental measurements for capability of this system are carried out,and the cavity is adjusted by two criteria.Results show that RMS of measurement in linear cavity is better than 7×10-6,and the biggest measurement error is 1.3×10-5,which is in agreement with the analysis.