摘要
为减轻生产、加工难度和减少材料浪费,提出了CVD复制技术制备ZnS头罩的方法。着重阐述了衬底和CVD过程对复制ZnS头罩的影响,并列举了复制ZnS头罩时衬底材料的要求。
A chemical vapor deposition process has been used to replicated ZnS dome to alleviate the difficulties of production and machining and to reduce the waste of material.The paper emphases the influence of substrates and CVD process on ZnS dome replication.The paper also exemples the demands of substract for ZnS dome.
出处
《红外与激光工程》
EI
CSCD
北大核心
2007年第z2期133-135,共3页
Infrared and Laser Engineering
