物理汽相生长并五苯晶体薄膜

Physical Vapor Growth of Pentacene Crystal Thin Films

用物理汽相沉积法在水平系统中生长有机半导体并五苯晶体薄膜。用 10～ 30毫克的源生长出 2 0～ 30mm2 大小的适合特性测量和器件制备的晶体薄膜。利用扫描电镜 (SEM )、透射电镜 (TEM )和X射线衍射仪 (XRD)

Physical vapor deposition in horizontal systems has been used to grow crystal thin film of organic semiconductor pentacene. Using 10～30 mg of starting material, 20～30 mm 2 sized crystal thinfilms, suitable for characterization measurements or device fabrication, have been grown. The thin film of pentacene crystal is analyzed by using TEM, X ray diffraction and scanning electron microscopy.