改善多步法谐波抑制的新方法——鉴相法

A New Error Separation Method—— Phase-distinguish Method to Improve Multi-step Error Separation Method

分析了回转基准中存在的问题和多步法误差分离技术的原理误差 ,提出鉴相法误差分离技术。该技术较显著地扩展了无谐波抑制范围 ,且使测量过程和测量系统大为简化 ,是建立纳米精度回转基准的一种较理想方法。

This paper analyzes the problems existing in the rotary datum and the system error of multi-step error separation method. Based on this, a new error separation method is presented, namely phase-distinguish method. The method largely expand the range without harmonious suppression, moreover, greatly simplify the measuring process and the measurement equipment. Thereby this method is a ideal method to establish the rotary datum with nanometer accuracy and realize nanometer measurement.