一、二阶释放模型在表面微机械中的应用

Application of First-and-second Order Release-etch Modeling forSurface Micromachined Structures

随着硅表面微机械技术的发展,使得许多微机械器件的制作成为可能。通过对一、二阶释放腐蚀模型进行深入研究,详细分析了一、二阶混合释放腐蚀模型在微机械中几种基本牺牲层腐蚀结构中的应用,并对分析结果进行仿真计算和分析。

Recent development of silicon micromachining technology has made possible the fabrication of many micromechanical devices. Through an in depth research on the first-and-second order sacrificial layer release-etch model, several fundamental micromachined structures are analyzed using the first-and-second order release-etch model. Simulation and analysis has been done on the results.