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竖直式HVPE反应系统的理论模拟与GaN厚膜生长 被引量:1

Theoretical Simulation of Vertical HVPE Reactor and GaN Thick Film Growth
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摘要 根据流体动力学模型,研究了反应气体在反应室内的浓度分布,以及反应室的温场分布.NH3浓度在衬底附近分布均匀,而GaCl浓度在衬底中心区域较大,周边较小.实验结果表明,外延层在中心区生长速率为260μm/h,周边为140/μm/h.X射线摇摆曲线半高宽为141".O杂质的引入,使得样品具有较强的黄光发射.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第z1期253-256,共4页 半导体学报(英文版)
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