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不同晶面蓝宝石和氧源对ZnO薄膜生长的影响 被引量:1

Effect of Different Facets of Sapphire and Oxidizers on the Growth of ZnO Films
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摘要 在c面和r面蓝宝石上用氧气和甲醇作为氧源分别沉积了ZnO薄膜.用X射线双晶衍射(DCXRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)对ZnO薄膜综合表征.证实了,面蓝宝石的表面能比c面的小,更有利于增原子的迁移,从而实现ZnO的二维生长.发现甲醇作为氧源生长的薄膜晶体质量跟氧气作为氧源的相比有较大提高,这可能源于预反应的减弱和甲醇的表面活化作用.在r面蓝宝石上用甲醇作为氧源生长出了表面平整的ZnO薄膜,其(1012)面的非对称衍射的摇摆曲线半高宽仅0.10.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第z1期289-292,共4页 半导体学报(英文版)
基金 国家自然科学基金资助项目(批准号:60376013,60506002)
关键词 ZNO 蓝宝石 甲醇 XRD SEM
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参考文献12

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同被引文献14

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