摘要
介绍和分析了几种等离子体微波器件中等离子体源 。
Some plasma sources in plasma microwave devices have been introduced and analyzed in this paper, the design and its driving circuit of a compact hydrogen plasma gun have been discussed in detail.
出处
《国防科技大学学报》
EI
CAS
CSCD
2000年第z1期73-76,共4页
Journal of National University of Defense Technology
基金
国家 8 6 3计划项目资助