摘要
本文介绍一个最佳掺杂含量表达式 ,应用此表达式定量计算了 Sn O2 ∶ Sb气敏薄膜的最佳掺杂含量 ,定量计算的结果与实验数据十分符合。
Analysis of experimental antimony doped stannic oxide gas sensor films with various doping levels is presented. The relationship among the physical property, crystal structure, preparation method and doping content is established to be a parabola equation. The extreme value of this equation determines the optimum doping content. The optimum doping content of antimony doped stannic oxide films determines by this quantitative method agrees with the experimental results.
出处
《传感技术学报》
CAS
CSCD
2002年第4期315-317,共3页
Chinese Journal of Sensors and Actuators
关键词
气敏元件
晶体结构
制备方法
最佳掺杂含量
理论计算
gas sensors
crystal structure
preparation method
optimum doping content
theoretical calculation
